micromachining

999	surface
442	subsurface
395	RHEED
392	microfabrication
389	semiconductor
386	plasmon
384	coatings
383	nanoscale
376	plasmons
369	silicon

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polypropylene nano microscopy photolithographic microelectromechanical polymeric coating adsorption GCIB microelectronics insulating nanostructures photolithography structures absorbent dielectric laminates PDMS smocking nanometer etching reflectance Anodized etch wafer polymers dealkalized semiconducting materials microlithography spectroscopy electrodes porous surfactant amorphous polycrystalline microstructure TACE

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